DESCRIPTION
The mini diaphragm gauge was developed for high purity applications with limited space requirements, such as smaller integrated gas stick and gas box assemblies. The nominal sizes of 1″ and 1.3″ are ideal for applications.
The mini diaphragm gauge is helium leak tested and the internals are electropolished to optimally meet purity standards.
Wutch such UHP chracteristic, the mini diaphragm gauge various gas distribution system, as well as medical gas application.
The mini diaphragm gauge complies with SEMATECH and SEMI standards to optimally ensure the quality your applications demand.
APPLICATION
- For gaseous and liquid, also agresive media for demanding high purity applications, also in aggresive ambience
- Semiconductor and flat panel industry
- Medical gases
- Gas distribution
- Hook-up applications
Special Features
- Mechanical pressure gauge with diaphragm element
- Compact design for minimal dead volume and reduced pacticle generation and entrapment
- Helium leak tested, leak rate ≤10-9 mbar l/s
- Electropolished wetted parts, surface with Ra < 025µm (Ra < 10 µin) for diaphragm element and measuring chamber
- Process connector components from electroplidhed 316 L with metal sealing disc, orbital welded to measuring chamber.